New coupled-field device simulation tool for MEMS based on the TP2000 CAD platform Academic Article
Overview
publication date
- August 1, 1999
has subject area
published in
- Sensors and Actuators A-physical Journal
Identity
Digital Object Identifier (DOI)
Additional Document Info
start page
- 9
end page
- 18
volume
- 76
issue
- 1-3