Patterns for design in microtechnology Academic Article

authors

Albers, Albert

publication date

February 19, 2010

has subject area

published in

Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems Journal

Digital Object Identifier (DOI)

https://doi.org/10.1007/s00542-010-1042-8

start page

1537

end page

1545

volume

16

issue

8-9