Research Atlas
English (United States)
English (United States)
Deutsch (Deutschland)
Index
Log in via ORCiD
Search form
Menu
Home
People
Organizations
Research
Events
TCAD tool for innovative MEMS and MOEMS: an all-in-one solution
Conference Paper
Overview
Identity
View All
Overview
authors
Büttgenbach, S.
publication date
February 7, 2008
has subject area
computer science
engineering
medicine
published in
Proceedings of SPIE
Journal
Identity
Digital Object Identifier (DOI)
https://doi.org/10.1117/12.773043
share the URI for this profile
view profile in RDF format
close